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O: Fachverband Oberflächenphysik

O 48: Scanning Probe Methods I

O 48.5: Vortrag

Mittwoch, 2. April 2014, 11:30–11:45, GER 38

Advances in Scan Movement Linearization for High-Speed AFM Imaging — •Anne-D. Müller and Falk Müller — Anfatec Instruments AG, Melanchthonstr. 28, 08606 Oelsnitz

In the past decade, several approaches have been undertaken to speed up the raster scan of an Atomic Force Microscope into the 100 Hz range or even higher with the aim to produce artifact free images. From the hardware side, specialized stiff scanner designs with very high resonance frequencies have been developed, some of them even using a push-pull technique. The most promising method, however, is the resonance compensation by a dedicated shaping of the scan ramp output first realized by a simple notch filter, whose parameters are adapted to the scanner [1].

This contribution presents a smarter and more flexible design method for a filtered and linearized scan control of high-speed AFMs, that works for all kind of scanners, even if they have strong non-linearities, large hysteresis and multiple resonances. Moreover, a first approach for the reduction of resonances in z-direction is presented.

[1] DJ Burns, K Youcef-Toumi, and GE Fantner. Nanotechnology. 22.31 (2011).