Frankfurt 2014 – scientific programme

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HK: Fachverband Physik der Hadronen und Kerne

HK 46: Poster

HK 46.87: Poster

Thursday, March 20, 2014, 16:00–18:00, HZ Poster

Quality assessment of ultra-thin CMOS sensors for the micro vertex detector of the CBM experiment at FAIR. — •Michal Koziel, Norbert Bialas, and Borislaw Milanovic for the CBM-MVD collaboration — University of Frankfurt, Germany.

The Compressed Baryonic Matter experiment installed at the future FAIR facility will be equipped with a high-precision micro-vertex detector aiming at an outstanding primary and secondary vertex resolution. Highly granular, ultra-low material budget sensors, so-called Monolithic Active Pixel Sensors,, manufactured at standard CMOS process, will be employed. Imperfections in CMOS process as well as further dicing and thinning procedures affect the yield of sensors to be mounted in the detector stations. To select sensors with the best characteristics, probe testing prior to integration is mandatory. However, handling and testing of 50-um thin CMOS pixel sensors is non-standard . This contribution will present the dedicated tools and procedures, focusing on the question whether such thin devices can be efficiently and reliably probe-tested.

*supported by HIC for FAIR, GSI , BMBF (05P12RFFC7), EU-FP7 HadronPhysics3