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CPP: Fachverband Chemische Physik und Polymerphysik
CPP 28: New Instruments and Methods
CPP 28.5: Talk
Tuesday, March 17, 2015, 15:00–15:15, C 264
Analysis of vibrating microstructures using dynamic scanning electron microscopy (DySEM) — •Maria Schröter1, Martin Ritter2, Matthias Holschneider3, and Heinz Sturm1 — 1BAM 6.9, Federal Inst. Materials Research, Berlin — 2Electron Microscopy, TU Hamburg-Harburg — 3Inst. Mathematics, Univ. Potsdam
The term ''DySEM'' (Dynamic Scanning Electron Microscopy) denotes an experimental procedure for measuring the vibrational dynamics of a microscale oscillator using a scanning electron beam. The DySEM technique enables the direct observation of freely vibrating structures, including several modes in the normal and torsional direction as well as their higher harmonics. Additionally, the DySEM images contain characteristic amplitude-dependent image features.
Thus, this method is a tool of modal analysis of microscale structure in oscillation, which is frequently used in micro- and nanoelectromechanical systems (MEMS and NEMS) and where an optimization of the design parameters often only can be achieved by imaging the vibration (1). The advantage of DySEM technique is the ability to distinguish between artefacts based on the imaging process and features which carry relevant information (i.e. nonlinear mechanical behavior of the micro-oscillator, especially in tapping mode microscopy of soft matter). Our talk concentrates on experimental issues, the underlying theory of the experimental results is shown in a corresponding poster.
(1) Schröter; Dissertation TU Berlin (2014)