Berlin 2015 – wissenschaftliches Programm

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DS: Fachverband Dünne Schichten

DS 19: Ion and electron beam induced processes

DS 19.9: Vortrag

Mittwoch, 18. März 2015, 12:00–12:15, H 2032

LMIS-Injector-Module including a beam formation unit for the generation of high mono- and polyatomic ion currents — •Philipp Laufer¹, Daniel Bock¹, Wolfgang Pilz¹, Lothar Bischoff², and Martin Tajmar¹ — ¹Technische Universität Dresden, 01062 Dresden — ²Helmholtz-Zentrum Dresden-Rossendorf, Bautzner Landstr. 400, 01328 Dresden

A high current Liquid Metal Ion Source (LMIS) module including ion optics for beam formation is developed. This spin-off from aerospace research for ion propulsion units enables ion currents in the order of 100 µ A [1]. A reservoir of more than 1 g propellant is used to guarantee long-term operation. The small module has a length and a diameter of 8 cm each. The ion optical components are designed and optimized by state-of-art simulation-tools to focus the highly divergent ion beam to a nearly parallel beam of about 2 mm diameter. About 10% of the total emitted current are cluster ions [2]. Together with a mass separating system the module will offer high polyatomic ion currents, which can be used to manufacture nanostructured or smooth surfaces on cm² area. Moreover, the module can be applied as a sputter tool for analysis of solid surfaces. As the majority of the sputtered particles are neutral the combination with an Electron Beam Ion Source (EBIS) [3] would enable to ionize these particles for mass analysis or to generate highly charged ions.

[1] M. Tajmar, et al., Ultramicroscopy 111 (2010)

[2] L. Bischoff, et al., Nucl. Instr. and Meth. B 272 (2012) 198

[3] M. Schmidt, et al., 12th Int. Symp. on EBIS a. Traps (EBIST’14)