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DS: Fachverband Dünne Schichten
DS 2: Thin Film Characterisation I: Structure Analysis and Composition
DS 2.9: Vortrag
Montag, 16. März 2015, 11:45–12:00, H 0111
Microstructure and mechanical properties of Pd-Si amorphous thin films — •Sree Harsha Nandam1, Di Wang1, Ruth Schwaiger2, Zbigniew Sniadecki1, Yulia Ivanisenko1, Herbert Gleiter1, and Horst Hahn1 — 1Institute for Nanotechnology, Karlsruhe Institute of Technology, D-76344 Eggenstein-Leopoldshafen, Germany. — 2Institute for Applied Materials, Karlsruhe Institute of Technology, D-76344, Eggenstein-Leopoldshafen, Germany.
Amorphous thin films of Pd80Si20 were co-sputtered using Pd and Si targets in a direct current sputtering system. X-ray diffraction of the thin films clearly revealed the amorphous nature and the microstructure of the films showed a morphology consisting of nanograins. Such amorphous nanograined thin films are termed as "nanoglasses" in the present day literature. Transmission electron microscopic studies on these films confirmed the amorphous nature of the films with little variation of the composition (segregation) on the scale of the nanograined substructure. Annealing of the thin films below 200°C (for 24h) caused no big change of the nanostructure, at temperatures around 250°C (for 24h) crystallization of the films was observed. Nanoindentation of the films showed a slightly higher Young's modulus compared to the melt-spun counterparts reported in the literature. Possible reasons for the appearance of a "nanoglass" structure and for the increased Young's modulus of the Pd-Si amorphous thin films are discussed.