Berlin 2015 – wissenschaftliches Programm

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DS: Fachverband Dünne Schichten

DS 36: Poster Session I

DS 36.107: Poster

Donnerstag, 19. März 2015, 09:30–12:00, Poster A

Microstructure of Ruddlesden-Popper SrO(SrTiO₃)_n films, prepared by means of Atomic Layer Epitaxy with Metalorganic Aerosol Deposition — •Fryderyk Lyzwa¹, Markus Jungbauer¹, Sebastian Hühn¹, Ricardo Egoavil², Haiyan Tan², Jo Verbeeck², Gustaaf Van Tendeloo², and Vasile Moshnyaga¹ — ¹1. Physikalisches Institut, Universität Göttingen — ²EMAT, University of Antwerp, Groenenborgerlaan 171, 2020 Antwerp, Belgium

The Ruddlesden-Popper(RP) films represent a material system, in which perovskite layers of (SrTiO₃)_n are separated by SrO layers. Those dielectrics are promissing due to low-loss for microwave frequencies. We report RP thin films of SrO(SrTiO₃)_n with n= 2, 3, 4 using metalorganic aerosol deposition (MAD) in the atomic layer epitaxial mode (ALE). The films were grown on SrTiO₃(100) by sequential deposition of Sr-O/Ti-O₂ atomic layers monitored by optical in-situ ellipsometry. The RP structure was confirmed by X-ray diffraction and transmission electron microscopy. A large number of RP defects observed close to the substrate identifies the STO-surface as a source of RP defects under the oxidizing conditions employed during MAD. To control this behavior we used a buffer between substrate and film and also other types of substrates such as LSAT(100) and DyScO₃(110). Financial support from EU FP 7 Project IFOX (interfacing oxides) is acknowledged.