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DS: Fachverband Dünne Schichten

DS 36: Poster Session I

DS 36.110: Poster

Donnerstag, 19. März 2015, 09:30–12:00, Poster A

Phenomenological Monte-Carlo Simulation of Gold Cluster Growth Kinetics during sputter deposition — •Sven-Jannik Wöhnert, Matthias Schwartzkopf, Stephan V. Roth, and Wilfried Wurth — DESY, Notkestr. 85, D-22607 Hamburg, Germany

Sputter deposition routinely applied to install tailored nanostructures on surfaces. One very suitable method retrieve nanoscale information on such surface is grazing incidence small-angle X-ray (GISAXS) scattering. This method can ideally be combined with in-situ investigations and real-time observations of layer deposition [1,2]. Based on experimental results for noble metal sputter deposition, we introduced sucessful a mean field model of sphericalnoble metal gluster growth with a near-field hexagonal lattice on oxide surfaces [1,2]. In order to distinguish the influence of different particle properties and deposition parameters, we introduced a phenomenological Monte-Carlo Simulation We present quantitative visualization of the different growth modes of the real-time experiments [1,2].Especially we are able to compare the influence of kinetic diffusion and aggregation rate on mean cluster size, mean cluster distance and the percolation threshold. We compare our results to different experimental conditions [1,2].

[1] M. Schwartzkopf, Nanoscale, 2013,5, 5053-5062 [2] G. Santoro, Applied Physics Letters 104 (24), 243107