Berlin 2015 – wissenschaftliches Programm
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DS: Fachverband Dünne Schichten
DS 36: Poster Session I
DS 36.22: Poster
Donnerstag, 19. März 2015, 09:30–12:00, Poster A
Structural and electrical characterization of Ar+ irradiated TiO2 thin films — •Daniel Blaschke1, Agnieszka Bogusz1, René Hübner1, Frans Munnik1, René Heller1, Andrea Scholz1, Franziska Nierobisch1, Vikas Rana3, Sibylle Gemming1,2, and Peter Zahn1 — 1Institute of Ion Beam Physics and Materials Research, Helmholtz-Zentrum Dresden-Rossendorf — 2Chair of Scale-bridging Materials Modeling, Physics Department, TU Chemnitz — 3Peter Grünberg Institut, Forschungszentrum Jülich
Transition metal oxide thin films, like TiO2, are promising candidates for future memory storage devices. They are extensively studied to get a better understanding of the role of oxygen for structural changes and electronic transport inside the films. A defective, nonstoichiometric TiO2−x layer can act as a reservoir for oxygen vacancies and improves the switching characteristics. Such a layer was introduced into the virgin TiO2 film by low energy Ar+ irradiation with different energies and fluencies to modulate the depths and level of the defective region. The impact of the irradiation to the surface morphology and crystal structure was monitored by AFM and TEM measurements and was found to be surface smoothing and amorphization. The role of the preferential sputtering of oxygen to the stoichiometry of the film was investigated with TRIDYN simulations. Electrical properties of the irradiated films were characterized by I-V and C-V measurements and are related to the structural changes caused by the Ar+ irradiation.
The project is funded by the Initiative and Networking Fund of the Helmholtz Association (Virtual Institute Memriox, VH-VI-422).