Berlin 2015 – wissenschaftliches Programm
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DS: Fachverband Dünne Schichten
DS 36: Poster Session I
DS 36.32: Poster
Donnerstag, 19. März 2015, 09:30–12:00, Poster A
Study of the properties of sputtered TCO layers on flexible glass — •Jasper Westphalen1,2, Manuela Junghähnel2, Stephanie Weller2, and Edda Rädlein1 — 1Technische Universität Ilmenau, Department of Inorganic-Nonmetallic Materials, Ilmenau, Germany — 2Fraunhofer Institute for Organic Electronics, Electron Beam and Plasma Technology FEP, Dresden, Germany
Ultra-thin glass is a new flexible substrate material for electronics and display applications. Transparent conductive oxides (TCOs) are a key material for transparent electrodes for photovoltaics. In this study, aluminum doped zinc oxide (AZO) films were deposited by magnetron sputtering on different flexible glasses.
The influence of the deposition parameters including oxygen partial pressure and substrate temperature on the surface morphology, electrical, optical and mechanical properties of the films were investigated.
In order to improve the optical and the electrical properties, we used flash lamp annealing (FLA) as a post-deposition annealing method for ultra-short thermal treatment in the millisecond range.
The film thickness was determined by mechanical measurements with an XP-200 stylus profiler (AMBIOS technology). We measured the transmittance and reflectance with the optical spectrometer Lambda 19 (Perkin Elmer) in the range of 300 to 2000 nm. The sheet resistance R has been measured with a four point probe FPP 5000 from Veeco Instruments.