Berlin 2015 – scientific programme

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DS: Fachverband Dünne Schichten

DS 36: Poster Session I

DS 36.37: Poster

Thursday, March 19, 2015, 09:30–12:00, Poster A

Characterization of titaniumoxide nanonlayers by soft X-ray emission spectrometry with an efficient wavelength dispersive spectrometer — •Rainer Unterumsberger, Matthias Müller, and Burkhard Beckhoff — Physikalisch-Technische Bundesanstalt

In the present work, the detection and analysis of nanoscaled materials by X-ray Emission Spectrometry (XES) was performed by means of an increased sensitivity of a Wavelength Dispersive Spectrometer (WDS) [1]. The increased sensitivity of the WDS was achieved by an effective focusing of monochromatized soft X-ray undulator radiation down to the micrometer range using a high quality single bounce monocapillary [2]. Due to the increased sensitivity of the WDS, the chemical speciation of different nanoscaled titanium compounds was achieved and the transition probabilities of titanium Ll- and Lα-fluorescence radiation could be determined as a function of the chemical bonding. The measurements were carried out at the plane-grating monochromator (PGM) beamline in the laboratory of the Physikalisch-Technische Bundesanstalt (PTB) at BESSY II using monochromatized undulator radiation and calibrated instrumentation [3,4].

References

[1] M. Müller et al., Phys. Rev. A 79, 032503 (2009) [2] R. Unterumsberger et al., Spectrochimica Acta Part B 78 (2012) 37-41 [3] B. Beckhoff et al., Anal. Chem. 79, 7873 (2007) [4] B. Beckhoff, J. Anal. At. Spectrom. 23, 845 (2008)

*corresponding author: rainer.unterumsberger@ptb.de