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DS: Fachverband Dünne Schichten

DS 36: Poster Session I

DS 36.66: Poster

Donnerstag, 19. März 2015, 09:30–12:00, Poster A

Nano structuring of lithium niobate by ion beams — •Sven Bauer, Henry Holland-Moritz, and Carsten Ronning — Friedrich-Schiller-Universität, Institut für Festkörperphysik, Helmholtzweg 3, 07743 Jena

Lithium niobate (LiNbO3) is a promising material for a wide range of electro-optical applications, because of its excellent properties, e.g. large electro-optical and non-linear optical coefficients. Structuring of LiNbO3 by standard etching technologies is difficult due to its chemical inertness. Ion beam enhanced etching has proven to be the most promising method for structuring the material for optical applications, whereas the final structure is defined by a mask. This mask is usually produced by electron beam lithography, which is an expensive and time consuming method when it comes to large areas to process. Instead one may just use self-assembled nanostructures as a mask, such as nanowires or nanoparticles. First, simulations were performed by the Monte-Carlo-code iradina [C. Borschel et al., Nucl Instr Meth B 269, 2133-3138 (2011)] for the ion irradiation of CdS, ZnO nanowires and Gold nanoparticles. Thus, LiNbO3 samples, which were covered by such nanostructures, were irradiated with Argon, Krypton and Neon ions with energies ranging from 40 to 200 keV. Consecutively, all samples were etched in liquid HF-solution. Furthermore, Rutherford backscattering spectrometry and scanning electron microscopy methods were used for investigating the damage formation and morphological effects.