Berlin 2015 – scientific programme

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MI: Fachverband Mikrosonden

MI 10: Poster: Microanalysis and Microscopy

MI 10.1: Poster

Wednesday, March 18, 2015, 15:00–17:30, Poster B

Ion Beam Analysis in a Helium Ion Microscope — •Nico Klingner, René Heller, Gregor Hlawacek, Stefan Facsko, and Johannes von Borany — Helmholtz-Zentrum Dresden-Rossendorf, Germany

Helium ion microscopes (HIM) have become powerful imaging devices within the last decade. Their enormous lateral resolution of below 0.3 nm and the highest field of depth make them a unique tool in surface imaging. So far the possibilities to identify target materials (elements) are rather limited.

In the present contribution we will show concepts as well as preliminary studies on the capability, efficiency and the limits of applying (Rutherford) Backscattering Spectrometry (RBS) within a HIM device to image samples with target mass contrast and to analyze target compositions. We will present different concepts of how to realize RBS in a HIM and point out mayor challenges and physical limitation.