Berlin 2015 – wissenschaftliches Programm

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MI: Fachverband Mikrosonden

MI 10: Poster: Microanalysis and Microscopy

MI 10.8: Poster

Mittwoch, 18. März 2015, 15:00–17:30, Poster B

The dependency of an EBSD detectors exposure on electron beam current and primary energy — •Susanne Wolff, Michael Hietschold, Steffen Schulze, and Nathanael Jöhrmann — Technische Universität Chemnitz, Chemnitz, Germany

The investigation of solid samples with a scanning electron microscope (SEM) and a detector for electron backscatter detection (EBSD) is very important for the structural analysis. Here, the analysis of crystallites with less than 100 nm size creates challenges for EBSD analysis technique. Due to the small crystallite size the diameter of the electron beam has to be small enough and a low primary energy is necessary to ensure a small enough interaction volume with the sample. Both demands result in a small electron beam current. Consequently the resulting EBSD diffraction patterns are weak. Therefore, the exposure time has to be extended which is limited by stability of sample and instrument. For that reason the dependence of the EBSD screen exposure time on the settings of a scanning electron microscope has been studied in detail here.