Berlin 2015 – scientific programme

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MI: Fachverband Mikrosonden

MI 3: Analytical Scanning Electron Microscopy

MI 3.2: Talk

Monday, March 16, 2015, 15:45–16:00, EMH 225

Monte Carlo Simulations for Transmission Kikuchi Diffraction — •Nathanael Jöhrmann and Michael Hietschold — Institut für Physik, Technische Universität Chemnitz, 09107 Chemnitz

Transmission Kikuchi Diffraction in a Scanning Electron Microscope is an interesting modification of Electron Backscatter Diffraction to get information about crystalline structures with high spatial resolution. However, it is not easy to decide about optimal parameters for sample thickness, sample tilt, working distance or acceleration voltage. In addition, for each new sample material it might be necessary to choose a completely different set of parameters. Since the sample preparation for Transmission Kikuchi Diffraction is difficult, it is desirable to know beforehand, if the lateral resolution would improve significantly in comparison to Electron Backscatter Diffraction.

To avoid time consuming experiments, we use Monte Carlo simulations to predict the influence of sample thickness, sample position and acceleration voltage on the detector signal, exposure time and expected lateral resolution.