Berlin 2015 – scientific programme
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O: Fachverband Oberflächenphysik
O 23: Plasmonics and Nanooptics: Structure, Fabrication and Characterization
O 23.5: Talk
Tuesday, March 17, 2015, 11:30–11:45, MA 043
Creating metallic nanostructures by electron beam induced deposition (EBID) for plasmonic applications — •Caspar Haverkamp1, Katja Höflich1, and Silke Christiansen1,2 — 1Helmholtz-Zentrum Berlin für Materialien und Energie, Berlin, Germany — 2Max Planck Institute for the Science of Light, Erlangen, Germany
During EBID a gas-injection system (GIS) inserts a precursor Gas into the vacuum chamber of an scanning electron microscope (SEM). The molecules which adsorb, desorb and diffuse at the substrate surfaces and are locally decomposed by the electron beam. While the volatile part is pumped out the non-volatile part forms the deposit onto the substrate. By controlling the electron beam movement via a patterning engine various shapes can be realized. As precursor gas the metal-organic compound dimethyl-(acetylacetonate) Gold(III), short Me2Au(acac) is used, resulting in nanometer-sized gold particles embedded in a carbonaceous matrix. Since the metal content of this material is very low, two approaches are discussed how to overcome this drawback. The first one is to decrease the carbon content of the structure by an in-situ post-treatment with water vapor irradiated by the electron beam. The splitting of the water molecules by the electron beam results in reactive oxygen species which react with the carbon of the EBID structure creating volatile carbon oxides. The second approach is to use the EBID structure as template and achieving the plasmonic response by a metallic coverage .