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O: Fachverband Oberflächenphysik
O 73: Nanostructures at Surfaces: 1D and 2D Structures
O 73.10: Poster
Mittwoch, 18. März 2015, 18:15–21:00, Poster A
Dynamic Bragg-like scattering in GISAXS from rough gratings — •Victor Soltwisch1, Jan Wernecke1, Anton Haase1, Michael Krumrey1, Juergen Probst2, Max Schoengen2, and Frank Scholze1 — 1Physikalisch-Technische Bundesanstalt — 2Helmholz-Zentrum Berlin
The decrease in feature size down to several nm is chall enging for the given metrology toolsets. X-ray scattering with grazing incidence angles (GISAXS), close to the critical angle, is a fast and non-destructive method with a high surface sensitivity. We report the observation of dynamic scattering effects from rough structured surfaces which leads to higher ordering of the Yoneda lines.