Berlin 2015 – wissenschaftliches Programm
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O: Fachverband Oberflächenphysik
O 73: Nanostructures at Surfaces: 1D and 2D Structures
O 73.4: Poster
Mittwoch, 18. März 2015, 18:15–21:00, Poster A
Glancing Angle Deposition of Metal Nanostructures — •Christoph Grüner1, Sachin K. Srivastava2, Ibrahim Abdulhalim2, and Bernd Rauschenbach1 — 1Leibniz-Institut für Oberflächenmodifizierung, Permoserstraße 15, 04318 Leipzig, Germany — 2Ben Gurion University, Beer Sheva, 84105, Israel
Glancing angle deposition (GLAD) is an ultra high vacuum physical vapor deposition process, which utilizes the self-shadowing between growing crystallites, that appears if the substrate is highly tilted with respect to the incoming particle beam. In this configuration separated nanostructures grow, leading to a thin film with very high porosity. GLAD of different metals (Cr, Ti, Al, Ag) is investigated and the resulting nanostructures are compared between each other and with the well investigated growth of silicon nanostructures. The influence of growth temperature, surface diffusion and substrate rotation is discussed. Based on the GLAD technology, a biosensor chip for detection of a protein biomarker of endocrine disrupting compounds in aquatic environment is developed.