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P: Fachverband Plasmaphysik

P 14: Poster Session - Theory and Modelling

P 14.6: Poster

Dienstag, 3. März 2015, 16:30–18:30, Foyer Audimax

Global Modeling of DLC-coatings for automotive applications — •Wladislaw Dobrygin¹, Dirk Bluhm¹, Stephan Danko¹, Oliver Schmidt¹, and Ralf Peter Brinkmann² — ¹Department for Coating Technologies and Surface Engineering, Robert Bosch GmbH, Germany — ²Institut für Theoretische Elektrotechnik, Ruhr-Universität Bochum, Germany

Diamand-like Carbon (DLC) coatings are very important for nowadays injection technology to prevent friction and wear. They enable high injections pressure and thus contribute to the reduction of fuel consumption and emission. DLC coatings are deposited using plasma enhanced chemical vapor deposition (PECVD) processes. Film properties and deposition rates are determined by the plasma process conditions. It takes great amount of time and effort to investigate all correlations experimentally in industrial scale chambers. An efficient way to study complex plasmas and fundamental processes is a zero-dimensional global chemical model. The process conditions (absorbed power, pressure, gas flow), the plasma chemistry and the electron energy distribution function are the crucial model input parameters. This fast model allows us to analyze a few hundred operating points with different input parameters per day. Important parameters like deposition rate, gas utilization, dust formation and layer composition can be derived from the simulation. This helps to understand and optimize the coating process. In this work we present details and challenges of a global model for DLC coating deposition. We demonstrate the influence of different PECVD processes on the derived results.