Bochum 2015 – wissenschaftliches Programm

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P: Fachverband Plasmaphysik

P 14: Poster Session - Theory and Modelling

P 14.8: Poster

Dienstag, 3. März 2015, 16:30–18:30, Foyer Audimax

Cluster Growth Processes in Magnetron Plasmas — •Kenji Fujioka, Sebastian Wolf, and Michael Bonitz — ITAP, University Kiel, Germany

Nanoparticles and nanomaterials have become media buzz words in recent years owing to their utilization in the fabrication of unique and novel materials. As fundamental building blocks to many materials and thin films, nano-scaled metal clusters are of great importance. These clusters can be easily and efficiently generated, and subsequently deposited, with magnetron sputtering sources. Perhaps the most critical property of these clusters is their size distribution. To that end, we present recent kinetic Monte Carlo simulations [1] that model the formation and growth processes of metal clusters in a magnetron cluster source environment. We focus on the interplay of key processes that give rise to size distribution line shapes as observed in experiments [2]. [1] M. Bonitz et al, Contrib. Plasma Phys. 52, No. 10, 804 (2012). [2] M. Ganeva et al, Plasma Sources Sci. Technol. 22, 045011 (2013).