Bochum 2015 – wissenschaftliches Programm
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P: Fachverband Plasmaphysik
P 17: Poster Session - Plasma Technology
P 17.5: Poster
Dienstag, 3. März 2015, 16:30–18:30, Foyer Audimax
Combination of discharge- and laser-produced plasmas for high brightness extreme ultraviolet (EUV) light sources — •Richard Lensing1,2,4, Florian Melsheimer1,2,4, Girum Beyene1,2,3,4, and Larissa Juschkin1,2,4 — 1Experimental Physics of EUV, RWTH Aachen University — 2Peter Grünberg Institut (PGI-9), Research Centre Jülich GmbH — 3School of Physics, University College Dublin — 4Jara - Fundamentals of Future Information Technology
We present the concept of a compact EUV light source using a hybrid approach combining the techniques of discharge and laser produced plasmas. In this so called laser-heated discharge plasma (LHDP) approach a Z-pinch plasma is electrically generated and optically heated. The goal of the project ist to generate highly brilliant incoherent EUV radiation with minimum required laser pulse energy and discharge currents. To achieve this, the discharge of a triggered hollow cathode source produces and confines a "cold" and dense plasma, which is used as a target for a pulsed Nd:YAG laser beam. The optical heating of the plasma partially restores the energy, which is lost due to the EUV emission. Thus the time for the emission of EUV radiation is prolonged and the collapse due to energy losses can be delayed. Furthermore the etendue of the EUV emission is reduced, since the size of the optical heated area is controlled by the laser focus diameter, which is far smaller than the Z-pinch diameter.