Bochum 2015 – wissenschaftliches Programm
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P: Fachverband Plasmaphysik
P 24: Theory and Modelling III
P 24.5: Vortrag
Donnerstag, 5. März 2015, 11:40–11:55, HZO 50
Collisionless electron heating in periodic arrays of inductively coupled plasmas — •Uwe Czarnetzki1 and Khristo Tarnev2 — 1Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Bochum, Germany — 2Department of Applied Physics, Technical University-Sofia, BG-1000 Sofia, Bulgaria
A novel mechanism of collisionless heating in large planar arrays of small inductive coils operated at radio frequencies is presented. In contrast to the well-known case of non-local heating related to the transversal conductivity, when the electrons move perpendicular to the planar coil, we investigate the problem of electrons moving in a plane parallel to the coils. Two types of periodic structures are studied. Resonance velocities where heating is efficient are calculated analytically by solving the Vlasov equation. Certain scaling parameters are identified. The concept is further investigated by a single particle simulation based on the ergodic principle and combined with a Monte Carlo code allowing for collisions with Argon atoms. Resonances, energy exchange, and distribution functions are obtained. The analytical results are confirmed by the numerical simulation. Pressure and electric field dependences are studied. Stochastic heating is found to be most efficient when the electron mean free path exceeds the size of a single coil cell. Then the mean energy increases approximately exponentially with the electric field amplitude.