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P: Fachverband Plasmaphysik

P 4: Plasma Technology I

P 4.7: Vortrag

Montag, 2. März 2015, 15:55–16:10, HZO 30

Correlation between Ion Transport and Plasma Oscillations in DC and HiPIMS discharges — •Ante Hecimovic, Volker Schulz von der Gathen, Achim von Keudell, and Jörg Winter — Institut für Experimentalphysik II

Recent findings show that plasma oscillations are commonly found in magnetrons, regardless of the power supply and power levels obtained. We present a comprehensive investigation of the oscillation properties in terms of amplitude, frequency and rotation direction using the 12 flat probes, installed azimuthally around the circular magnetron. The investigated discharge conditions encompass both DC and HiPIMS discharges with current density ranging from 0.5mA/cm2 to 5A/cm2. The results exhibit a wide spectrum of frequencies ranging from 250 Hz to 200 kHz. When the flat probes are negatively biased, the ion saturation current is collected and measured. The correlation between the observed oscillations and the ions transported away from the target allows establishing a qualitative understanding of the ion transport for wide range of discharge currents in DC and HiPIMS discharges. The results are compared with the Hall parameter, a measure commonly used to evaluate the cross-field transport, reducing from 16 in DC discharges to values of around 2 in HiPIMS discharge.