Bochum 2015 – wissenschaftliches Programm
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P: Fachverband Plasmaphysik
P 5: Poster Session - Low Temperature Plasmas
P 5.16: Poster
Montag, 2. März 2015, 16:30–18:30, Foyer Audimax
Barrier layers for OLEDs encapsulation — •Mariagrazia Troia1, Andreas Schulz1, Martina Leins1, Matthias Walker1, Thomas Hirth1, Wim Deferme2, Filip Govaert3, Melanie Hoerr4, Viktorija Mecnika4, and Marc Van Parys5 — 1IGVP, University of Stuttgart, 70569 Stuttgart, Germany — 2IMO Hasselt University, 3590 Diepenbeek, Belgium — 3Centexbel, 9052 Zwijnaarde, Belgium — 4ITA, RWTH Aachen University, 52074 Aachen, Germany — 5TO2C, University College, 7000 Gent, Belgium
Organic polymers employed as emitters in OLEDs are quickly degraded by oxygen, thus requiring the highest degree of protection amongst current electronic devices. The encapsulation approach (VITEX technology) consists of several transparent layers of alternatively inorganic and organic thin films that can increase the overall diffusion length inside the barrier layer and thus extend the operating lifetime of the encapsulated device.
Plasma Enhanced Chemical Vapor Deposition has been performed by means of an Electron Cyclotron Resonance cold, microwave plasma, by employing hexamethyldisilazane (HMDSN) as precursor gas and by adding nitrogen for the organic layers and oxygen for the inorganic ones, respectively. The work presents an overview of the layers produced thus far, their chemical composition and barrier performances and their dependence upon the gaseous feed composition.
This work is part of the Printing of Light-Emitting Devices on Textile (POLEOT) project and is partly funded by the AiF within the CORNET-program.