Heidelberg 2015 – wissenschaftliches Programm

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HK: Fachverband Physik der Hadronen und Kerne

HK 2: Instrumentation 1

HK 2.6: Vortrag

Montag, 23. März 2015, 16:00–16:15, M/HS1

Development of optical quality assurance procedures for the sensors of Silicon Tracking System (STS) detector of the Compressed Baryonic Matter Experiment (CBM) at FAIR — •Evgeny Lavrik for the CBM collaboration — Eberhard-Karls Universität Tübingen, Tübingen, Deutschland

The CBM experiment aims to study the properties of nuclear matter at high net-baryon densities. The STS is the key detector to reconstruct charged particle tracks created in heavy-ion interactions. In order to assure the quality of about 1300 silicon sensors, highly efficient and highly automated procedures need to be developed.

In this contribution we report on a microscope camera based optical inspection system, used to scan along the individual sensors to recognize and classify sensor defects. Examples of these defects are: photo-resist residues, top metallization layer lithography defects, surface scratches. In order to separate and classify these defects various image-processing algorithms are used, including: pattern recognition, object classification, etc.