Darmstadt 2016 – wissenschaftliches Programm

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HK: Fachverband Physik der Hadronen und Kerne

HK 7: Instrumentation I

HK 7.4: Vortrag

Montag, 14. März 2016, 15:00–15:15, S1/01 A2

Optical quality assurance procedures for the sensors of CBM STS Detector — •Evgeny Lavrik for the CBM collaboration — Physikalisches Institut der Universität Tübingen, Deutschland

The Compressed Baryonic Matter (CBM) experiment at FAIR aims to study the properties of nuclear matter at high net-baryon densities. The Silicon Tracking System (STS) is the key detector to reconstruct charged particle tracks created in heavy-ion interactions. In order to assure the quality of about 1300 silicon sensors, highly efficient and highly automated procedures need to be developed.

In this contribution we report on a microscope camera based optical inspection system, used to scan along the individual sensors to recognize and classify sensor defects. Examples of these defects are: photo-resist residues, top metallization layer lithography defects, surface scratches. In order to separate and classify these defects various image-processing algorithms are used, including: pattern recognition, object classification etc.