Hannover 2016 – wissenschaftliches Programm

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P: Fachverband Plasmaphysik

P 20: Poster Session- Low Temperature Plasmas

P 20.22: Poster

Mittwoch, 2. März 2016, 16:30–19:00, Empore Lichthof

Short Timescale Phenomena in Plasma-Surface Interactions* — •Jean-Pierre van Helden and Jürgen Röpcke — Leibniz Institute for Plasma Science and Technology (INP Greifswald), Greifswald

Understanding how plasmas interact with solid and liquid surfaces is of central importance in many fields such as microelectronics, materials and surface processing and in environmental and biomedical technologies. Improving process efficiency requires a comprehensive understanding of the kinetics of the transient intermediates involved at the plasma-substrate interface. The experimental approaches currently available provide an incomplete picture of plasma-surface interactions due to relatively low sensitivity and low time resolution, and restricted multi-species capability. We propose to use state of the art mid-infrared frequency combs (FCs) to provide novel spectroscopic data on plasma-surface problems. FCs will be used as the light sources in broadband cavity enhanced direct frequency comb spectroscopy (CE-DFCS) that can detect many transient species simultaneously yielding comprehensive data on their kinetics in proximity to the surface on a microsecond scale. Simultaneously the surface will be probed by an evanescent-wave provided by attenuated-total-reflection-CE-DFCS. The simultaneous measurement of the plasma and surface environments with the high sensitivity and time resolution of DFCS will provide new fundamental insights into the physics and chemistry of the interfacial region, an essential step for improving plasma technology in industry.

*Part of the Kiel research initiative 'The Plasma Interface'