Hannover 2016 – scientific programme

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P: Fachverband Plasmaphysik

P 20: Poster Session- Low Temperature Plasmas

P 20.2: Poster

Wednesday, March 2, 2016, 16:30–19:00, Empore Lichthof

Separated effects of ions, metastables and photons on the properties of barrier layers on polymers — •Beatrix Biskup, Marc Böke, Jan Benedikt, and Achim von Keudell — Experimental Physics II - Application Oriented Plasma Physics, Ruhr-University Bochum, 44780 Bochum, Germany

Analyses of a-C:H /a-Si:H multilayers on polymer substrates indicated that prolonged ion bombardment influences negatively the properties of the barrier layer, while a short plasma pretreatment can improve the barrier effect. This work is motivated by these results and plans to investigate the influence of different plasma particle species, namely ions, metastables and (V)UV-photons, on the properties of the grown barrier layer. To separate the different species and their influence on plasma pretreatment and film growth, we will build an ion-repelling grid system, which will repel the ions from the substrate, so that only metastables and (V)UV-photons will have an effect on the layer. In a second approach we will try to separate the effect of argon metastables from the effect of (V)UV photons. In addition to the before mentioned ion-repelling grid we will use a collimator with a high aspect ratio and an argon or helium gas-shower before the substrate. With this setup it will be possible to reduce the metastable density in front of the substrate, so that only (V)UV-photons will have an effect. In this approach we will be able to study the different effects of the plasma species and also possible synergy effects, to improve the properties of the barrier layer.