Hannover 2016 – wissenschaftliches Programm
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P: Fachverband Plasmaphysik
P 22: Theory and Modelling III
P 22.7: Vortrag
Donnerstag, 3. März 2016, 12:55–13:10, b305
Numerical analysis of radio-frequency sheath — •Schabnam Naggary and Ralf Peter Brinkmann — Institute for Theoretical Electrical Engineering, Bochum, Germany
The characteristics of radio frequency (RF) modulated plasma boundary sheaths are studied on
the basis of the so-called ”standard sheath model”.
This model assumes that the applied radio frequency ωRF is larger than the plasma frequency
of the ions but smaller than that of the electrons.
It comprises a phase-averaged ion model – consisting of an equation of continuity (with ionization neglected)
and an equation of motion (with collisional ion-neutral interaction taken into account) –,
a phase-resolved electron model – consisting
of an equation of continuity and the assumption of Boltzmann equilibrium –, and Poisson’s equation for the electrical field.
Previous investigations have studied the standard sheath model under additional approximations,
most notably the assumption of a step-like electron front [1].
This contribution presents an investigation and parameter study of the standard sheath model which avoids any further assumptions.
The resulting density profiles and overall charge-voltage characteristics are compared with those of the
step-model based theories.
1. V.A. Godyak and Z.K. Ghanna, Sov. J. Plasma Phys. 6, 372 (1979)