Hannover 2016 – wissenschaftliches Programm

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P: Fachverband Plasmaphysik

P 26: Poster Session-Plasma Diagnostics

P 26.14: Poster

Donnerstag, 3. März 2016, 16:30–19:00, Empore Lichthof

Thermal probe and VI-Probe measurements on a combination of HiPIMS and plasma based ion implantation — Sven Gauter¹, •Maik Fröhlich², Wagdi Garkas², Holger Kersten¹, and Martin Polak² — ¹Institute of Experimental and Applied Physics, Christian-Albrechts-University Kiel, Germany — ²Leibniz Institute for Plasma Science and Technology, Greifswald, Germany

The combination of HiPIMS and plasma based ion implantation (PBII) offers new possibilities for surface modification taking advantage of the high density of target ions and application of a synchronized high voltage bias pulse onto the substrate. A very important parameter in this combined experiment is the delay between HiPIMS pulse and PBII pulse, according to the evolution of the HiPIMS pulse.

In the present study we investigate the influence of the delay time, PBII pulse length and distance between substrate and magnetron on the substrate current as well as on the energy flux towards the substrate, measured by a highly time resolved VI-probe and by means of a calometric probe as described in [1]. The results exhibit a remarkable influence especially of the delay time and give information about the transport of the ions from target to substrate in form of a localized ion bunch, as described in [2].

[1] S.Bornholdt et al., Complex Plasmas, M.Bonitz et al. (Eds.), 197-234, 2014.

[2] W.Breilmann et al., Journal of Physics D: Applied Physics, 46(48):485204, 2013