Hannover 2016 – wissenschaftliches Programm

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P: Fachverband Plasmaphysik

P 26: Poster Session-Plasma Diagnostics

P 26.15: Poster

Donnerstag, 3. März 2016, 16:30–19:00, Empore Lichthof

Analytical Investigation of Surface Wave and Microwave Resonances of Curling Probe — •Ali Arshadi and Ralf Peter Brinkmann — Lehrstuhl für Theoretische Elektrotechnik, Bochum, Deutschland

The term ''active plasma resonance spectroscopy'' (APRS) denotes a related class of plasma diagnostic methods utilizing the natural ability of plasma to resonate on or near the plasma frequency: An electrical RF signal is coupled into the plasma via a probe, the response is recorded and a mathematical model is used to determine plasma parameters.

Curling probe (CP), recently invented by Liang et al. is a novel realization of APRS concept to measure the electron density. CP can be miniaturized and be flatly embedded into the chamber wall which prevents metal contamination release and electrical disturbance. Physically, CP can be understood as a ''curled'' form of the hairpin probe. FDTD simulation shows two kinds of resonance: Surface plasmon resonance which induces at frequencies smaller than plasma frequency and microwave resonance which is strongly dependent on the length of CP.

Assuming that the spiralization has little electrical effect, this manuscript investigates the characteristcs of a ''straightened'' CP by modeling it as a rectangular slot-type resonator which is in direct contact with the plasma. The diffraction of an incident plane wave at the slot is calculated by solving the cold plasma model and Maxwell's equations simultaneously. The resonances of the probe are obtained and good agreement with the numerical results of probe inventors is demonstrated.