Hannover 2016 – wissenschaftliches Programm
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P: Fachverband Plasmaphysik
P 26: Poster Session-Plasma Diagnostics
P 26.6: Poster
Donnerstag, 3. März 2016, 16:30–19:00, Empore Lichthof
Evidence of Secondary Electron Emission during PIII Pulses by Calorimetric Probe Measurements — •Fabian Haase1, Darina Manova2, Stephan Mändl2, and Holger Kersten1 — 1Institute of Experimental and Applied Physics, Christian-Albrechts-University Kiel, Germany — 2Leibniz Institute of Surface Modification, Leipzig, Germany
Plasma based coating processes are a widespread field in industrial surface modification. One of these methods is plasma immersion ion implantation (PIII), a pulsed technique to alter the substrate by implanting ions into the surface, which is commonly used in industry [1]. However, many accompanying processes during PIII have not yet been fully investigated but are crucial to the outcome of the coating procedure in terms of quality and properties of the deposited films.
Secondary electrons are a major, undesired component of energetic particles present in PIII. However, a direct measurement using a Faraday cup is both complex and error prone.
In this work an alternative method of measuring the thermal flux associated with energetic secondary electrons is presented using a calorimetric probe [2]. Angular variations have been performed to support the assumption of a directed flux. Further investigations include studies of parameter variation, such as pulse length, pulse voltage and pulse frequency using different substrate materials (Al, Cu, stainless steel). Additionally, the spatial effect has been investigated by changing the distance to the probe.
J.R. Conrad et al., J. Appl. Phys. 62 4591, 1987
S. Bornholdt and H. Kersten, Eur. Phys. J. D. 67(8):167 (2013)