Regensburg 2016 – wissenschaftliches Programm

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CPP: Fachverband Chemische Physik und Polymerphysik

CPP 15: Poster: Functional Polymer Hybrids

CPP 15.4: Poster

Montag, 7. März 2016, 18:15–21:00, Poster B2

Polymer metal composite: direct patterning by E-beam lithography — •Parisa Bakhtiarpour¹, Annina Steinbach², Stefan Jenisch², Steffen Strehle², Othmar Marti¹, and Masoud Amirkhani¹ — ¹Institute of Experimental Physics, University of Ulm, 89069 Ulm, Germany — ²Institute of Electron Devices and Circuits, University of Ulm, 89069 Ulm, Germany

Ionic polymer metal composites (IPMCs) have a wide range of applications as artificial muscle in robotic and micro robotics. To metalize ionic polymers such as Nafion, chemical reduction and electroless plating are common methods, but without the possibility to control the metal penetration into the polymer. The modality and depth of penetration have an important role in IPMC function, especially in micrometer sample size. To study the position and geometry of metal layer and their effect on performance, using a manageable method for metal electrodes fabrication is essential. In this work, E-beam has been used to pattern the polymer surface in desired shape with high value of accuracy and control. Physical methods like coating and sputtering can be applied after pattern process to cover the electrode area. We investigate various parameters for pattern formation and stable coating.