Regensburg 2016 – scientific programme
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CPP: Fachverband Chemische Physik und Polymerphysik
CPP 52: Focus: Two Dimensional Functional Materials I
CPP 52.5: Talk
Thursday, March 10, 2016, 11:15–11:30, H51
Making atomically thin perforated nanomembranes — •Andreas Winter1, Yasin Ekinci2, Armin Gölzhäuser3, and Andrey Turchanin1,4 — 1Institute of Physical Chemistry, Friedrich Schiller University Jena, 07743 Jena — 2Laboratory for Micro- and Nanotechnology, Paul Scherrer Institute, 5232 Villigen, Switzerland — 3Faculty of Physics, Bielefeld University, 33615 Bielefeld — 4Jena Center for Soft Matter, 07743 Jena
Two-dimensional (2D) materials like graphene, hexagonal boron nitride or carbon nanomembranes (CNMs) have recently attracted enormous interest due to their potential use in electronics, chemical and biological sensors, nanofilters, and hybrid materials. Lithographic patterning of 2D materials allows to form nanostructures required e.g. in filter or nanosensoric applications. In this respect, extreme UV interference lithography (EUV-IL) provides possibilities for large-scale and high resolution patterning with an ultimate size limit in the 10 nm-range. Here we present the preparation of atomically thin perforated nanomembranes and their characterization with a helium ion microscope (HIM), which is especially suitable to image topographic features of freely suspended membranes. Examples for the area-selective crosslinking of self-assembled monolayers and resist-based lithography as well as the use of perforated membranes for interferometry of massive molecules will be given.