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Regensburg 2016 – wissenschaftliches Programm

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DS: Fachverband Dünne Schichten

DS 12: Postersession DS

DS 12.20: Poster

Montag, 7. März 2016, 17:00–19:00, Poster A

3D conformal deposition of ceramic layers on complex metallic tools and injection molds via chemical vapor deposition — •Tatiana Fedosenko-Becker1, Friederike Deuerler1, Gregor Fornalczyk2, and Frank Mumme21University of Wuppertal, School of Mechanical Engineering and Safety Engineering, Material Technology, Wuppertal, Germany — 2Gemeinnuetzige KIMW Forschungs-GmbH, Luedenscheid, Germany

Chemical vapor deposition (CVD) is a well-known process to produce high quality thin coatings, such as films with specific properties to protect metallic tools and injection molds from wear, corrosion, and others. However, it can be difficult to obtain a high-performance coating on complicated three-dimensional surfaces of some tools. It needs understanding of the formation of solid material from a gaseous phase, containing complex molecules of volatile matter; research of metalorganic precursors, which decompose at low temperatures (500 °C) and allow the deposition of conformal layers into narrow cracks and holes; and the detailed research of the 3D substrate materials to clarify the influence of the steel alloy on the adhesion of the layers.

The aim of this study is the deposition of CVD layers for three-dimensional zirconia coatings on metallic tools and injection molds. At the present stage of the research the way of deposition and characterization of the coatings on 3D surfaces is developed, the experimental parameters for successful deposition of zirconia layers are found and physical and geometrical properties of the substrate materials are investigated.

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