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DS: Fachverband Dünne Schichten

DS 35: Thin Film Characterisation: Structure Analysis and Composition II

DS 35.12: Vortrag

Mittwoch, 9. März 2016, 18:00–18:15, H8

Quantitative AM-FM Mode for Fast, Versatile Imaging of Nanoscale Elastic Modulus — Marta Kocun, Aleksander Labuda, Waiman Meinhold, •Florian Johann, and Roger Proksch — Asylum Research, an Oxford Instruments Company, Wiesbaden, Germany

Tapping mode AFM imaging, also known as amplitude-modulated (AM) atomic force microscopy (AFM), is fast, gentle and provides the high spatial resolution necessary for imaging nanoscale features. However, until recently, mechanical characterization with tapping mode was limited to only qualitative results. In AM-FM mode, a bimodal (dual-frequency) technique, the first resonant mode is operated in AM, whereas a higher resonant mode is frequency modulated (FM). As expected from regular tapping mode, AM-FM mode delivers topographical information. Additionally, it provides quantitative data on contact stiffness, from which elastic modulus can be calculated with appropriate models for the tip-sample contact mechanics. Experimental results on different samples such as metals, alloys and polymers will be presented to demonstrate the applicability of AM-FM mode for materials with a wide range of modulus (MPa-GPa).