Regensburg 2016 – wissenschaftliches Programm

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DS: Fachverband Dünne Schichten

DS 8: Thin Film Characterisation: Structure Analysis and Composition I

DS 8.4: Vortrag

Montag, 7. März 2016, 16:00–16:15, H8

Ion beam sputter deposition (IBSD) of cubic MgO and NiO — •Martin Becker, Robert Hamann, Mario Gies, Fabian Michel, Angelika Polity, and Martin Eickhoff — 1st Physics Institute, Justus Liebig University Giessen, Heinrich-Buff-Ring 16, 35392 Giessen, Germany

Ion beam sputter deposited MgO and NiO thin films were grown on (0 0 0 1) (c-cut), (0 1 1 2) (r-cut), (1 1 2 0) (a-cut) and (1 0 1 0) (m-cut) sapphire substrates. A pure Ni metallic target and a MgO ceramic target were processed with different gas mixtures of argon and oxygen at elevated substrate temperatures. X-ray photoelectron spectroscopy (XPS) and energy dispersive X-ray spectroscopy (EDX) were used to identify composition and stoichiometry. It is shown, that elevated temperatures favor crystallization in preferential orientations. The determined out-of-plane relationships were XO(111)||Al₂O₃(0 0 0 1) (c-cut), XO(111)||Al₂O₃(1 1 2 0) (a-cut) and XO(110)||Al₂O₃(1 0 1 0) (m-cut) for X = Mg/Ni, whereas on Al₂O₃(0 1 1 2) (r-cut) no significant out-of-plane intensity was observed. XRD rocking curves indicated small full width at half maximum (FWHM) around 10-100 arcsec. X-ray pole figures and reciprocal space mapping (RSM) indicated distinct epitaxial in-plane relationships. The morphology was studied by scanning electron microscopy (SEM) and atomic force microscopy (AFM), which reveal smooth and homogeneous surfaces for thin layers, enabling their use as appropriate buffer layers for established IBSD-sputtered materials like cuprous oxide and stannic oxide.