Regensburg 2016 – wissenschaftliches Programm

Bereiche | Tage | Auswahl | Suche | Aktualisierungen | Downloads | Hilfe

HL: Fachverband Halbleiterphysik

HL 31: Silicon-based Semiconductors I

HL 31.1: Vortrag

Dienstag, 8. März 2016, 12:15–12:30, H14

Ultrahigh Sensitivity Chemical and Biological Sensors Based on Silicon Junctionless Nanowire Transistors — •Yordan M. Georgiev¹, Ran Yu², Elizabeth Buitrago³, Adrian M. Nightingale⁴, Olan Lotty², Nikolay Petkov², and Justin D. Holmes² — ¹Institute of Ion Beam Physics & Materials Research, HZDR, Dresden, Germany — ²Materials Chemistry and Analysis Group, Department of Chemistry and Tyndall National Institute, UCC, Cork, Ireland — ³Nanoelectronic Devices Laboratory, EPFL, Lausanne, Switzerland — ⁴Nanostructured Materials & Devices Group, Department of Chemistry, Imperial College London, UK

Junctionless nanowire transistors (JNTs) are very promising as chemo- biosensors due to their simple structure, easy fabrication and potential for ultrahigh sensitivity. Therefore, JNT sensors with various numbers, lengths, and widths (down to 10 nm) of the nanowires were fabricated by a top-down process on positively doped SOI wafers. The nanowires were functionalised either with 3-aminopropyltriethoxysilane (APTES) or with APTES and biotin. Polydimethylsiloxane (PDMS) stamps with microfluidic channels were then attached to the chip surface and buffer solutions containing different analytes were flowed over the sensors by a syringe pump. In this way, series of experiments for sensing ionic strength, pH value, and the protein streptavidin were performed. The JNT sensors demonstrated the highest sensitivity reported to date towards streptavidin, corresponding to a detection of only few protein molecules.