Regensburg 2016 – wissenschaftliches Programm
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HL: Fachverband Halbleiterphysik
HL 46: Organic Semiconductors
HL 46.3: Vortrag
Mittwoch, 9. März 2016, 10:00–10:15, H13
Conformal growth of ultra-thin p-conductive polymer layers on n-type semiconductor nanostructures by oxidative chemical vapour deposition — •Linus Krieg1, Stephanie Bley2, Max Rückmann2, Jürgen Gutowski2, Florian Meierhofer3, Lutz Mädler3, and Tobias Voss1 — 1Institute of Semiconductor Technology and LENA, Braunschweig University of Technology — 2Institute of Solid State Physics, Semiconductor Optics, University of Bremen — 3Foundation Institute of Material Science, Department of Production Engineering, University of Bremen
Inorganic-organic hybrid systems consisting of conjugated polymers and inorganic semiconductors are promising for the development of cheap, versatile and tailored electronic and optoelectronic devices. A gentle approach for polymer layer deposition is offered by the oxidative chemical vapour deposition (oCVD), a solventless and dry method where the oxidising agent and the monomer are provided in the gaseous phase. In our experiments, we use FeCl3 as an oxidising agent and monomers of the p-conductive polymers polypyrrole (PPy) and poly(3,4-ethylenedioxythiophene) (PEDOT) to conformally coat n-type ZnO and GaN wafers and nanowires. SEM and TEM measurements confirm that we can achieve conformal coating of the entire nanowire with the conductive polymer while the optical properties of the inorganic semiconductors show no substantial deterioration. The layer thickness is in the order of a few tens of nanometres and can be controlled by the total amount of the oxidising agent provided during the coating process.