Regensburg 2016 – wissenschaftliches Programm

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HL: Fachverband Halbleiterphysik

HL 5: Quantum Dots and Wires: Single Photon Sources

HL 5.6: Vortrag

Montag, 7. März 2016, 11:30–11:45, H15

Enhanced in-situ cathodoluminescence lithography for the deterministic fabrication of quantum light sources — •Arsenty Kaganskiy, Manuel Gschrey, Alexander Schlehahn, Jan-Hindrik Schulze, Ronny Schmidt, Tobias Heindel, Sven Rodt, André Strittmatter, and Stephan Reitzenstein — Institut für Festkörperphysik, Technische Universität Berlin, Hardenbergstraße 36, D-10623

Future nanophotonic devices will rely on the development of sources for indistinguishable single photons and entangled photon pairs based on self-assembled quantum dots (QDs). Preselected QDs with the mentioned properties need to be deterministically embedded into photonic structures to enhance their photon extraction efficiency. In order to meet this requirement we developed a deterministic technology platform named enhanced in-situ cathodoluminescence lithography (eCLL) [1]. By using marker structures the eCLL technique allows for a detailed spectral pre-characterization of QD properties such as emission energy, fine-structure splitting (FSS) and decay time of excitonic complexes before integrating the QDs with high alignment accuracy into, e.g., microlenses. In this way, QDs with small FSS can be selected and integrated into microlenses in order to realize efficient sources of polarization entangled photon pairs. Moreover, the eCLL technique allows for a direct comparison of the QD properties before and after the processing. For instance we observed a two-fold shortening of the decay time that could be related to a moderate Purcell effect.

[1] A. Kaganskiy et al., Rev. Sci. Instrum. 86 (2015), 073903.