Regensburg 2016 – wissenschaftliches Programm

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HL: Fachverband Halbleiterphysik

HL 53: Poster II

HL 53.35: Poster

Mittwoch, 9. März 2016, 09:30–13:30, Poster A

Hydrogen sensing with sub-micrometer Pt/TiO2 sensors — Svenja Herbertz, •Mihai Cerchez, and Thomas Heinzel — Heinrich Heine University Düsseldorf, Universitätsstr. 1, D-40225 Düsseldorf

Pt/TiO2 hydrogen sensors are technically well established although the underlying physics is still at debate due to incomplete understanding of the interplay between oxygen vacancies, titanium interstitials, and hydrogen incorporation in disordered systems. In addition, operational voltages required may lead to electroforming effects [1]. Here we present a submicrometer lateral sensor produced by local anodic oxidation of a Ti thin layer evaporated on an insulating layer. A brief Pt evaporation produces clusters of Pt at the TiO2 without shortcutting the lateral contacts [2]. We discuss the sensing and the influence of oxygen and humidity as well as electroforming effects.

[1] M. Strungaru, M. Cerchez, S. Herbertz, T. Heinzel, M. El Achhab, and K. Schierbaum, Appl. Phys. Lett. 106, 143109 (2015) [2] S. Herbertz, M. Cerchez and T. Heinzel, Sensors and Actuators B 221, 401 (2015)