Regensburg 2016 – wissenschaftliches Programm
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HL: Fachverband Halbleiterphysik
HL 86: Oxide Semiconductors for Device and Energy Applications 2
HL 86.2: Vortrag
Donnerstag, 10. März 2016, 15:15–15:30, H11
Metal incorporation and reaction-kinetics for the molecular beam epitaxial growth of (GaxIn1−x)2O3 — •Patrick Vogt and Oliver Bierwagen — Paul-Drude-Institut für Festkörperelektronik, Hausvogteiplatz 5–7, 10117 Berlin, Germany
This contribution presents the metal incorporation and reaction-kinetics study of the plasma-assisted molecular beam epitaxial (MBE) growth of the transparent semiconducting oxide alloy (GaxIn1−x)2O3. By using MBE, an impinging Ga- (ΦGa), In- (ΦIn), and oxygen-flux (ΦO) react amongst others to (GaxIn1−x)2O3 on a heated, single-crystalline substrate under ultra-high vacuum conditions. The data obtained were measured in-situ by a laser reflectometry (LR) set-up and a line-of-sight quadrupole mass spectrometer (QMS) or ex-situ by energy dispersive X-ray spectroscopy (EDX). The LR allowed measuring the growth-rate (ρ), the QMS enabled identifying the species that desorbed off the substrate which are not incorporated into the alloy, and the EDX measurements revealed the In incorporation x and the reciprocal Ga incorporation 1-x.
We present the growth rate dependencies of the binary grown In2O3 and Ga2O3 as function of growth temperature (TG). Furthermore, we show the dependence of ρ and x for the ternary grown alloy on TG, the metal-to-oxide ratio (rMeO = (ΦIn+ΦGa)/ΦO ) , and the In-to-Ga ratio (rInGa = ΦIn/ΦGa).
The measured discrepancy of ρ for the binary grown oxides compared to x for the ternary grown alloy can be explained by the different adhesion energies for In and Ga on the (GaxIn1−x)2O3 surfaces.