Regensburg 2016 – scientific programme
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MI: Fachverband Mikrosonden
MI 7: Poster: Microanalysis and Microscopy
MI 7.2: Poster
Wednesday, March 9, 2016, 18:00–20:00, Poster E
The estimation of thickness and composition of thin films using EDX — •Steffen Schulze1, Sandra Hahn2, Wolfgang Baumann3, and Hans-Jörg Hunger3 — 1TU Chemnitz, Physik, Analytik an Festkörperoberflächen — 2TU Chemnitz, Maschinenbau, Werkstoffwissenschaft — 3TU Karl-Marx-Stadt, Physik/EB
EDX is capable of estimating thickness and composition of thin films on substrates in the 10 nm range. The intensity ratio of X-rays from the coating to that of the substrate depends sensitively on film thickness. For taking into account the alterations of X-ray generation by substrate backscattering and of the absorption in the coating the depth distribution function of X-ray production as given by Packwood and Brown [1] has been slightly modified to take account of the thin film situation. Examples are given demonstrating successfull quantification and thickness determination by use of the according correction procedures.
[1] Packwood, Brown: X-ray spectroscopy, Vol. 10, 3 (1981).