Regensburg 2016 – wissenschaftliches Programm

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MM: Fachverband Metall- und Materialphysik

MM 26: Poster session II

MM 26.22: Poster

Dienstag, 8. März 2016, 18:30–20:30, Poster B3

New approach of segmentation of FIB tomograms of porous carbon-rich materials — •Manuel Mundszinger, Jörg Bernhard, Ute Golla-Schindler, and Ute Kaiser — Ulm University, Central Facility for Electron Microscopy, Group of Electron Microscopy of Materials Science, Albert-Einstein-Allee 11, 89081 Ulm, Germany

Focused ion beam (FIB)-Tomography is widely used in material sciences to gain quantitative information about the topography and composition of the specimen under investigation. With a single tomogram it is possible to determine the volume fraction and the surface of a selected element. Segmentation of FIB tomograms of a porous material can, however, be very troublesome caused by the high depth of focus given by the scanning electron microscope. Thus, the same grey level can be obtained e.g. for the top and the bottom of a pore. This can become the restricting hurdle for a reliable segmentation of the single picture and therefore of the whole tomogram. One possibility is to fill the pores with resin to decrease the insights in the sample structure. However, many resins are carbon-based and therefore this procedure only works fine as long as the sample does not contain carbon. Here we present a new way to face the problem associated with FIB-tomograms of porous materials with carbon-rich inclusions. For our method we use carbon-free industrial available coatings to avoid the loss of the carbon contrast in the SEM images. The best results were obtained when the sample was hydrophilized using a plasma cleaner, which increased the wetting and therefore the pore filling of the sample greatly.