Regensburg 2016 – scientific programme
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O: Fachverband Oberflächenphysik
O 33: Photonics and Nanooptics I: Infrared Spectroscopy
O 33.11: Talk
Tuesday, March 8, 2016, 13:00–13:15, H4
Large-Area Fabrication of TiN Nanoantenna Arrays for Refractory Plasmonics in the Mid-Infrared. — •Shahin Bagheri1, Christine M. Zgrabik2, Timo Gissibl1, Andreas Tittl1, Florian Sterl1, Ramon Walter1, Stefano De Zuani3, Audrey Berrier3, Thomas Stauden4, Gunther Richter5, Evelyn L. Hu2, and Harald Giessen1 — 14th Physics Institute and Research Center SCoPE, University of Stuttgart, Pfaffenwaldring 57, Stuttgart, Germany. — 2School of Engineering and Applied Sciences, Harvard University, Cambridge, MA 02138, USA. — 31st Physics Institute and Research Center SCoPE, University of Stuttgart, Pfaffenwaldring 57, Stuttgart, Germany. — 4Fachgebiet Nanotechnologie, Technische Universität Ilmenau, Ilmenau, Germany. — 5Max-Planck-Institut für Intelligente Systeme, D-70589 Stuttgart, Germany.
We utilize fast and wafer-scale fabrication methods such as direct laser writing and laser interference lithography to fabricate large-area nanoantenna arrays of TiN. Our lithographic tools allow for fast and homogeneous preparation of nanoantenna geometries on a polymer layer, which is then selectively transferred to TiN by subsequent argon ion beam and chemical wet etching process. Tailoring of the TiN antenna geometry enables precise tuning of the plasmon resonances from the near to the mid-infrared spectral range. The antennas are protected by an additional Al2O3 layer which allows for high-temperature annealing in argon flow without loss of the plasmonic properties.