Regensburg 2016 – scientific programme

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O: Fachverband Oberflächenphysik

O 68: Nanostructures at Surfaces: 1D, 2D Structures and Networks

O 68.4: Poster

Wednesday, March 9, 2016, 18:15–20:30, Poster A

Glancing angle deposition of metals — •Susann Liedtke, Christoph Grüner, Jürgen W. Gerlach, and Bernd Rauschenbach — Leibniz-Institut für Oberflächenmodifizierung, Permoserstraße 15, 04318 Leipzig, Germany

Glancing angle deposition (GLAD) represents an ultrahigh vacuum physical vapor deposition process that utilizes self-shadowing of growing crystallites. Such self-shadowing effects occur if the substrate is strongly tilted with respect to the incoming particle flux. So far, the growth of metallic GLAD nanostructures remains poorly understood. For that reason, in this study GLAD of metals with different melting points is examined. Precisely, Ti and Al nanostructures are grown on unstructured Si substrates. The growth of metal nanostructures is investigated depending on process parameters such as substrate temperature and the incidence angle of the particle beam. Finally, the resulting nanostructures are compared with each other.