Regensburg 2016 – wissenschaftliches Programm

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O: Fachverband Oberflächenphysik

O 9: Nanostructures at Surfaces I

O 9.1: Vortrag

Montag, 7. März 2016, 10:30–10:45, H6

Fabrication of nanostructures on thin organic layers by Focused Electron Beam Induced Processing — •Martin Drost¹, Fan Tu¹, Florian Vollnhals¹, Imre Szenti², Janos Kiss², Hans-Peter Steinrück¹, and Hubertus Marbach¹ — ¹Physik. Chemie II, FAU Erlangen-Nürnberg, GER — ²MTA-SZTE Reaction Kin. and Surf. Chem. Research Group, Un. of Szeged, HUN

Focused Electron Beam Induced Processing (FEBIP) comprises several nanofabrication techniques in which a focused electron beam of an electron microscope is used to modify the properties of adsorbed precursor molecules or the substrate itself. We demonstrate that it is possible to fabricate nanostructures using FEBIP with the precursors Co(CO)3NO and Fe(CO)5, on Si(111) and TiO2(110), both pre-covered with several layers of 2H-Tetraphenylporphyrin (2HTPP). At room temperature, both pristine surfaces are catalytically active towards the decomposition of Co(CO)3NO, leading to growth of a granular film, whereas EBID with Fe(CO)5 is selective. The catalytic activity of the pristine surfaces towards decomposition of Co(CO)3NO can be inhibited by a thin 2HTPP layer. On the corresponding organic interfaces it is possible to selectively fabricate nanostructures using FEBIP, with both precursors. The deposits are characterized by Scanning Electron Microscopy (SEM) and local Auger Electron Spectroscopy (AES). Supported by the DFG through grant MA 4246/1-2, research unit FOR 1878/funCOS; COST Action CM1301; Excellence Cluster EAM of the FAU Erlangen-Nürnberg.