Regensburg 2016 – wissenschaftliches Programm
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O: Fachverband Oberflächenphysik
O 9: Nanostructures at Surfaces I
O 9.2: Vortrag
Montag, 7. März 2016, 10:45–11:00, H6
Nanostructures fabricated via Focused X-ray Beam Induced Deposition (FXBID) — •Fan Tu, Martin Drost, Florian Vollnhals, Andreas Späth, Krick Calderon Sandra, Rainer H. Fink, Hans-Peter Steinrück, and Hubertus Marbach — Lehrstuhl für Physikalische Chemie II, Friedrich-Alexander Universität Erlangen-Nürnberg, Egerlandstr.3, D-91058, Erlangen, Germany
We will report the usage of a focused monochromatic X-ray beam for the fabrication of nanostructures by the local dissociation of adsorbed precursor molecules. A particular appealing aspect of monochromatic X-rays is thereby the potential to selectively address certain atoms and/or bonds within the precursor molecule and thus tuning the decomposition process. It has been proposed that especially the Auger decay process following the creation of a core hole by photoabsorption causes the selective dissociation of different bonds [1]. The local X-ray irradiation and the successive characterization were conducted at the PolLux beamline at the Swiss light source with a scanning transmission X-ray microscope (STXM). X-ray energy dependent deposition of Cobalt and Manganese carbonyl precursors will be investigated. The Chemical composition and the deposition yield were characterized by in-situ X-ray adsorption spectroscopy (XAS) in the STXM instrument.
Supported by the DFG via grant MA 4246/1-2, MA 4246/2-1, the cluster of excellence Engineering of Advanced Materials at the FAU Erlangen-Nürnberg and two granted beamtimes at the PolLux STXM of Swiss Light Source.
[1] Cazaux, J. Microsc. 188(1997), 106