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P: Fachverband Plasmaphysik

P 14: Plasma Wall Interaction

P 14.1: Poster

Dienstag, 14. März 2017, 16:30–18:30, HS Foyer

The effect of secondary electron emission on discharge properties in an rf-plasma — •Felix Georg, Thomas Trottenberg, and Holger Kersten — Institut für experimentelle und angewandte Physik, Kiel, Deutschland

A diagnostic combining a retarding field analyzer, a passive thermal probe and Langmuir probe techniques is presented. The setup is used to combine and compare measurements of these techniques to study the plasma-wall interaction for different materials.

In the plasma chamber two horizontal electrodes made of stainless steel are placed. The lower one is powered by an rf voltage with 13.56 MHz. The two electrodes are embedded into two MACOR contrivances which can be horizontally adjusted. Different materials (metal, metal oxide) can be placed onto the driven electrode. Thus, the interaction of the rf-plasma with the surface can be observed in special regard to varying secondary electron emission.

The electron density and energy distribution as well as the ion energy distribution have been independently measured. Additionally, the energy influx can be determined. By comparison of the three electric probe measurements the effect of the secondary electron emission of specific surfaces can be identified.