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P: Fachverband Plasmaphysik

P 22: Theory and Modelling II

P 22.5: Poster

Mittwoch, 15. März 2017, 16:30–18:30, HS Foyer

Electron and ion distribution functions in ccrf discharges with secondary electron emission — •Michael Marsand, Hanno Kählert, and Michael Bonitz — ITAP, Christian-Albrechts-Universität zu Kiel, Leibnizstr. 15, 24098 Kiel

Secondary electrons emitted from the electrodes can significantly affect the physical characteristics of ccrf discharges [1]. Here, we use PIC-MCC simulations (Particle-in-Cell with Monte-Carlo collisions) to resolve the electron and ion distribution functions in space and time during the rf cycle in Ar and He plasmas. We determine the influence of secondary electron emission (SEE) on the distribution functions in the bulk and sheath regions and perform a comparison for low and high gas pressures and different SEE coefficients.

[1] A. Derzsi, I. Korolov, E. Schuengel, Z. Donkó, and J. Schulze, Plasma Sources Sci. Technol. 24, 034002 (2015)