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P: Fachverband Plasmaphysik

P 22: Theory and Modelling II

P 22.7: Poster

Mittwoch, 15. März 2017, 16:30–18:30, HS Foyer

Fluid description of secondary electrons in low pressure ccrf discharges — •M. M. Becker¹, H. Kählert², M. Bonitz², and D. Loffhagen¹ — ¹INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald — ²ITAP, Christian-Albrechts-Universität zu Kiel, Leibnizstr. 15, 24098 Kiel

Recently, the classical and an advanced fluid model as well as Particle-in-cell/Monte Carlo collision (PIC/MCC) simulation methods have been applied for the theoretical description of capacitively coupled radio-frequency (ccrf) discharges in helium and argon in the pressure range from 10 to 80 Pa [1]. At this stage, the plasma-wall interaction has been neglected. In the present contribution, the impact of secondary electron emission on the results provided by the different solution methods for ccrf discharges in helium and argon at 20 Pa is investigated. It is shown that the fluid approach applied for the description of the electron component in argon discharges largely influences the results provided by the different fluid models. In contrast, the description of electrons in helium is found to be less crucial. The results of the different fluid models are compared to PIC/MCC simulation results.

This work is supported by the German Research Foundation (DFG) via SFB-TRR24.

[1] M. M. Becker et al., arXiv:1608.04601, submitted to Plasma Sources Sci. Technol.